X-ray microbeam studies of electromigration
- G.S. Cargill III
- A.C. Ho
- et al.
- 1999
- Materials Research Society Symposium - Proceedings
Publications
Date
Featured collections
Popular topics
26 results for P.-C. Wang
In-situ x-ray microbeam Cu fluorescence and strain measurements on Al(0.5 at.% Cu) conductor lines during electromigration
- H.K. Kao
- G.S. Cargill III
- et al.
- 1999
- Materials Research Society Symposium - Proceedings
Observation of local tilted regions in strain-relaxed SiGe/Si buffer layers using x-ray microdiffraction
- P.M. Mooney
- J.L. Jordan-Sweet
- et al.
- 1999
- Applied Physics Letters
A cost-effective method for minimizing the sphere-of-confusion error of x-ray microdiffractometers
- I.C. Noyan
- S. Kaldor
- et al.
- 1999
- Review of Scientific Instruments
Electromigration-induced stress in aluminum conductor lines measured by x-ray microdiffraction
- P.-C. Wang
- G.S. Cargill
- et al.
- 1998
- Applied Physics Letters
Local and global stress distributions in BEOL metallization
- I.C. Noyan
- E. Liniger
- et al.
- 1996
- MRS Spring Meeting 1996