Three-dimensional monolithic integration of III-V and Si(Ge) FETs for hybrid CMOS and beyond
- Veeresh Deshpande
- Vladimir Djara
- et al.
- 2017
- Japanese Journal of Applied Physics
Publications
Date
Featured collections
Popular topics
25 results for Veeresh Deshpande
DC and RF characterization of InGaAs replacement metal gate (RMG) nFETs on SiGe-OI FinFETs fabricated by 3D monolithic integration
- Veeresh Deshpande
- V. Djara
- et al.
- 2017
- Solid-State Electronics
Back-gated InGaAs-on-insulator lateral N+NN+ MOSFET: Fabrication and typical conduction mechanisms
- H.J. Park
- L. Pirro
- et al.
- 2017
- Solid-State Electronics
Tri-gate InGaAs-OI junctionless FETs with PE-ALD Al2O3 gate dielectric and H2/Ar anneal
- V. Djara
- Lukas Czornomaz
- et al.
- 2016
- Solid-State Electronics
Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
- V. Djara
- Marilyne Sousa
- et al.
- 2015
- Microelectronic Engineering