Bonding technologies for chip level and wafer level 3D integrationKatsuyuki SakumaSpyridon Skordaset al.2014ECTC 2014
Three-dimensional chip stack with integrated decoupling capacitors and thru-si via interconnectsBing DangMichael Shapiroet al.2010IEEE Electron Device Letters
Reliable through silicon vias for 3D silicon applicationsM.J. ShapiroM. Interranteet al.2009IITC 2009
Chip-to-Package Interaction for a 90 nm Cu / PECVD Low-k technologyW. LandersD. Edelsteinet al.2004IITC 2004