High resolution material ablation and deposition with femtosecond lasers and applications to photomask repair
- Richard Haight
- Alfred Wagner
- et al.
- 2004
- Journal of Modern Optics
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29 results for Alfred Wagner
Metal deposition with femtosecond light pulses at atmospheric pressure
- R. Haight
- P. Longo
- et al.
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
MARS: Femtosecond laser mask advanced repair system in manufacturing
- Richard Haight
- Dennis Hayden
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Minimum emission current of liquid metal ion sources
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Energy spread in liquid metal ion sources at low currents
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The role of the ion-solid interaction in ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- et al.
- 1991
- Journal of Applied Physics
In situ measurement of ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- 1989
- Journal of Applied Physics
Focused ion beam repair of lithographic masks
- A. Wagner
- J.P. Levin
- 1989
- Nuclear Inst. and Methods in Physics Research, B
The role of gas adsorption in ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- 1989
- Journal of Applied Physics