Focused ion beam metrology
- A. Wagner
- P.G. Blauner
- et al.
- 1995
- MRS Fall Meeting 1995
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29 results for Alfred Wagner
Electrodeposited gold;real times stress and structural chance at room temperature
- R.E. Acosta
- I. Babich
- et al.
- 1993
- MRS Spring Meeting 1993
Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- Patricia G. Blauner
- Andrew D. Dubner
- et al.
- 1993
- Microlithography 1993
The role of the ion-solid interaction in ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- et al.
- 1991
- Journal of Applied Physics
Model for focused ion beam deposition
- J.P. Levin
- P.G. Blauner
- et al.
- 1990
- Microlithography 1990
In situ measurement of ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- 1989
- Journal of Applied Physics
Focused ion beam repair of lithographic masks
- A. Wagner
- J.P. Levin
- 1989
- Nuclear Inst. and Methods in Physics Research, B
The role of gas adsorption in ion-beam-induced deposition of gold
- A.D. Dubner
- A. Wagner
- 1989
- Journal of Applied Physics
Future beam-controlled processing technologies for microelectronics
- Dieter P. Kern
- Thomas F. Kuech
- et al.
- 1988
- Science