Hydrogenated amorphous carbon film used as an alignment layer for liquid crystal displays
- Y. Kato
- Y. Nakagawa
- et al.
- 2002
- EURODISPLAY 2002
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30 results for James P. Doyle
Vertical electrical connections for multi-layer stacked display
- K. Matsumoto
- K. Takeda
- et al.
- 2002
- Asia Display/IDW 2002
Ion beam deposited diamond-like films: Synthesis, properties and applications
- J.J. Cuomo
- J. Doyle
- et al.
- 1990
- Carbon
Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- Willi Volksen
- Sampath Purushothaman
- et al.
- 2012
- ECS J. Solid State Sci. Technol.
Effect of radical species density and ion bombardment during ashing of extreme ultralow- κ interlevel dielectric materials
- M.A. Worsley
- S. Bent
- et al.
- 2007
- Journal of Applied Physics
Thermal stress evolution in embedded Cu/low-k dielectric composite features
- Conal E. Murray
- Charles C. Goldsmith
- et al.
- 2006
- Applied Physics Letters
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
- Steven Steen
- Sharee J. McNab
- et al.
- 2006
- Microelectronic Engineering
Electrically active point defects in n-type 4H-SiC
- J. Doyle
- M.K. Linnarsson
- et al.
- 1998
- Journal of Applied Physics
Copper diffusion in amorphous germanium
- J. Doyle
- A.Yu. Kuznetsov
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Observation of near-surface electrically active defects in n-type 6H-SiC
- J. Doyle
- A. Schöner
- et al.
- 1998
- Journal of Applied Physics