Radiometric consistency in source specifications for lithography
- Alan E. Rosenbluth
- Jaione Tirapu Azpiroz
- et al.
- 2008
- SPIE Advanced Lithography 2008
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20 results for Kehan Tian
Design of gradient index (GRIN) lens using photonic non-crystals
- Paul Stellman
- Kehan Tian
- et al.
- 2007
- CLEO 2007
Design of gradient index (GRIN) lens using photonic non-crystals
- Paul Stellman
- Kehan Tian
- et al.
- 2007
- QELS 2007
Global optimization of masks, including film stack design to restore TM contrast in high NA TCC's
- Alan E. Rosenbluth
- David Melville
- et al.
- 2007
- SPIE Advanced Lithography 2007
3D optics for ultra thin cameras
- George Barbastathis
- Kehan Tian
- et al.
- 2007
- COSI 2007
Design of Gradient Index (GRIN) lens using photonic non-crystals
- Paul Stellman
- Kehan Tian
- et al.
- 2007
- PhAST 2007
Design of Gradient Index (GRIN) lens using photonic non-crystals
- Paul Stellman
- Kehan Tian
- et al.
- 2007
- CLEO 2007
Design of Gradient Index (GRIN) lens using photonic non-crystals
- Paul Stellman
- Kehan Tian
- et al.
- 2007
- QELS 2007
Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
- David O. S. Melville
- Alan E. Rosenbluth
- et al.
- 2011
- Journal of Vacuum Science and Technology B
Dynamic group velocity control in a mechanically tunable photonic-crystal coupled-resonator optical waveguide
- Kehan Tian
- William Arora
- et al.
- 2009
- Physical Review B - CMMP