Stress liner proximity technique to enhance carrier mobility in high-κ metal gate MOSFETsDechao GuoKathryn Schonenberget al.2009MRS Fall Meeting 2009
Competitive and cost effective high-k based 28nm CMOS technology for low power applicationsF. ArnaudA. Theanet al.2009IEDM 2009
32nm general purpose bulk CMOS technology for high performance applications at low voltageF. ArnaudJ. Liuet al.2008IEDM 2008
Novel high-performance analog devices for advanced low-power high-k metal gate complementary metal-oxide-semiconductor technologyJin-Ping HanTakashi Shimizuet al.2011Japanese Journal of Applied Physics