Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation
- H. Sinha
- D.B. Straight
- et al.
- 2010
- JVSTA
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55 results for Y. Zhang
High performance wire-array silicon solar cells
- Oki Gunawan
- Kejia Wang
- et al.
- 2010
- Progress in Photovoltaics
CMOS-integrated high-speed MSM germanium waveguide photodetector
- Solomon Assefa
- Fengnian Xia
- et al.
- 2010
- Optics Express
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- M. Guillorn
- J. Chang
- et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Minimizing linewidth roughness in Step and Flash Imprint Lithography
- Niyaz Khusnatdinov
- Gerard M. Schmid
- et al.
- 2008
- Microelectronic Engineering
Polymer self assembly in semiconductor microelectronics
- Charles T. Black
- Ricardo Ruiz
- et al.
- 2007
- IBM J. Res. Dev
Highly porous silicon membrane fabrication using polymer self-assembly
- C.T. Black
- K.W. Guarini
- et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Patterning ∼20 nm half-pitch lines on silicon using a self-assembled organosilicate etch mask
- Linnea Sundström
- Leslie Krupp
- et al.
- 2006
- Applied Physics Letters
Fabrication of metal gated FinFETs through complete gate silicidation with Ni
- Jakub Kedzierski
- Meikei Ieong
- et al.
- 2004
- IEEE Transactions on Electron Devices
Extension and source/drain design for high-performance FinFET devices
- Jakub Kedzierski
- Meikei Ieong
- et al.
- 2003
- IEEE Transactions on Electron Devices