Sub-30nm scaling and high-speed operation of fully-confined Access-Devices for 3D crosspoint memory based on mixed-ionic-electronic-conduction (MIEC) materials
- K. Virwani
- G.W. Burr
- et al.
- 2012
- IEDM 2012
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29 results for Noel Arellano
Enabling complex nanoscale pattern customization using directed self-assembly
- Gregory S. Doerk
- Joy Y. Cheng
- et al.
- 2014
- Nature Communications
Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches
- Wei Sun
- Jie Shen
- et al.
- 2020
- Science
Surface initiated polymer thin films for the area selective deposition and etching of metal oxides
- Thomas G. Pattison
- Alexander E. Hess
- et al.
- 2020
- ACS Nano
Pattern placement accuracy in block copolymer directed self-assembly based on chemical epitaxy
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- ACS Nano
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
- Hsinyu Tsai
- Hiroyuki Miyazoe
- et al.
- 2016
- SPIE Advanced Lithography 2016
Directed self-assembly of topcoat-free, integration-friendly high-χ block copolymers
- Eri Hirahara
- Margareta Paunescu
- et al.
- 2015
- SPIE Advanced Lithography 2015
Customization and design of directed self-assembly using hybrid prepatterns
- Joy Y. Cheng
- Gregory S. Doerk
- et al.
- 2015
- SPIE Advanced Lithography 2015
Spin-on organic hardmask for topo-patterned substrate
- Kazuhiko Komura
- Yoshi Hishiro
- et al.
- 2014
- SPIE Advanced Lithography 2014
Recovery dynamics and fast (sub-50ns) read operation with Access Devices for 3D crosspoint memory based on mixed-ionic-electronic-conduction (MIEC)
- G.W. Burr
- K. Virwani
- et al.
- 2013
- VLSI Technology 2013