Spin-on organic hardmask for topo-patterned substrate
- Kazuhiko Komura
- Yoshi Hishiro
- et al.
- 2014
- SPIE Advanced Lithography 2014
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31 results for Noel Arellano
Recovery dynamics and fast (sub-50ns) read operation with Access Devices for 3D crosspoint memory based on mixed-ionic-electronic-conduction (MIEC)
- G.W. Burr
- K. Virwani
- et al.
- 2013
- VLSI Technology 2013
Deterministically isolated gratings through the directed self-assembly of block copolymers
- Gregory Sadasdf Doerk
- Joy Y. Cheng
- et al.
- 2013
- SPIE Advanced Lithography 2013
Thermally induced nanoimprinting of biodegradable polycarbonates using dynamic covalent cross-links
- Wiriya Thongsomboon
- Mark Sherwood
- et al.
- 2012
- ACS Macro Letters
Pattern placement accuracy in block copolymer directed self-assembly based on chemical epitaxy
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- ACS Nano
Sub-30nm scaling and high-speed operation of fully-confined Access-Devices for 3D crosspoint memory based on mixed-ionic-electronic-conduction (MIEC) materials
- K. Virwani
- G.W. Burr
- et al.
- 2012
- IEDM 2012
Fundamental study of extreme UV resist line edge roughness: Characterization, experiment, and modeling
- Ramakrishnan Ayothi
- Lovejeet Singh
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Large-scale (512kbit) integration of multilayer-ready access-devices based on Mixed-Ionic-Electronic-Conduction (MIEC) at 100% yield
- G.W. Burr
- K. Virwani
- et al.
- 2012
- VLSI Technology 2012
Investigation of pattern wiggling for spin-on organic hardmask materials
- Goji Wakamatsu
- Kentaro Goto
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
- Chi-Chun Liu
- Jed Pitera
- et al.
- 2012
- SPIE Advanced Lithography 2012