Ultrafast Deep UV Lithography with Excimer Lasers
- K. Jain
- B.J. Lin
- 1982
- IEEE Electron Device Letters
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104 results for C. Grant Willson
Chemical modification of poly (methyl acrylate) via metalation and α - substitution
- Jean M.J. Frechet
- Jean M. Farrall
- et al.
- 1982
- Polymer Bulletin
New lasers, VUV sources
- T. Srinivasan
- H. Egger
- et al.
- 1982
- Applied Physics B Photophysics and Laser Chemistry
Deep UV Photoresists I. Meldrum's Diazo Sensitizer
- Barbara D. Grant
- Nicholas J. Clecak
- et al.
- 1981
- IEEE T-ED