Reaction of niobium with diamond films
- C.R. Guarnieri
- F.M. d'Heurle
- et al.
- 1991
- Applied Surface Science
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108 results for J.J. Cuomo
Compositional changes during magnetron sputtering of alloys
- S.M. Rossnagel
- I. Yang
- et al.
- 1991
- Thin Solid Films
Collimated magnetron sputter deposition
- S.M. Rossnagel
- D.J. Mikalsen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Light scattering properties of x-ray lithography mask substrates
- J.R. Maldonado
- Y. Vladimirsky
- et al.
- 1991
- Microelectronic Engineering
Ion-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- Jerome J. Cuomo
- John Bruley
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The effects of substrate potentials on electron cyclotron resonance plasmas
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Studies of adhesion of metal films to polyimide
- David L. Pappas
- Jerome J. Cuomo
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The effects of concurrent oxygen ion bombardment on ion beam sputtered Y1Ba2Cu3Ox thin films
- J.P Doyle
- R.A Roy
- et al.
- 1990
- Thin Solid Films
Material dependence of property modification in ion-assisted evaporation of iron, nickel and cobalt
- R.A. Roy
- R. Petkie
- et al.
- 1990
- Surface and Coatings Technology
Internal stress and elasticity of synthetic diamond films
- B.S. Berry
- W.C. Pritchet
- et al.
- 1990
- Applied Physics Letters