Publications

221 results at Microelectronic Engineering

Low temperature Al-Cu planarization by PVD Al-Cu-Ge alloys (Invited lecture)
- - R.V. Joshi
- 1997
- Microelectronic Engineering
On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO₂ based dielectrics
- - D.A. Buchanan
  - J.H. Stathis
  - et al.
- 1997
- Microelectronic Engineering
Defect instability in ultra-thin oxides on silicon
- - L. Xie
  - K.R. Farmer
  - et al.
- 1997
- Microelectronic Engineering
Electrical characterization of Si/Si_0.7Ge_0.3 quantum well wires fabricated by low damage CF₄ reactive ion etching
- - K.Y. Lee
  - S.J. Koester
  - et al.
- 1997
- Microelectronic Engineering
Quantitative model of the thickness dependence of breakdown in ultra-thin oxides
- - J.H. Stathis
- 1997
- Microelectronic Engineering
Reliability and integration of ultra-thin gate dielectrics for advanced CMOS
- - D.A. Buchanan
  - S.H. Lo
- 1997
- Microelectronic Engineering
Light emission during direct and Fowler-Nordheim tunneling in ultra thin MOS tunnel junctions
- - E. Cartier
  - J.C. Tsang
  - et al.
- 1997
- Microelectronic Engineering
Microcolumn based low energy e-beam writing
- - C. Stebler
  - M. Despont
  - et al.
- 1996
- Microelectronic Engineering
Scaling silicon MOS devices to their limits
- - S.J. Wind
  - D.J. Frank
  - et al.
- 1996
- Microelectronic Engineering
Electron beam technology - SEM to microcolumn
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Microelectronic Engineering