Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
As a continued effort to improve the performance of low energy scanning electron probe systems for application in microscopy, lithography, metrology, etc., miniaturized electron beam columns, approximately 3 mm in length, demonstrating a probe size of 10 nm with a beam current of ≥ 1 n A at 1 keV, have been successfully developed. This paper presents current status, future directions and potential applications of these microcolumns.
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
T.N. Morgan
Semiconductor Science and Technology
P. Alnot, D.J. Auerbach, et al.
Surface Science
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999