Summary Abstract: Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite filmsJ. PerrinB. Despaxet al.1985JVSTA
Electron-gun Evaporators of Refractory Metals Compatible with Molecular Beam EpitaxyM. HeiblumJ. Blochet al.1985JVSTA
Summary Abstract: A Quantitative Ion Beam Process Applied to the Deposition of Aluminum Nitride Thin FilmsJ.M.E. HarperH.T.G. Hentzellet al.1984JVSTA