Publications

221 results at Microelectronic Engineering

Resist image enhancement by UV-, soft vacuum pulsed electron beams and organometallic compounds
- - Hiroyuki Hiraoka
- 1987
- Microelectronic Engineering
Photoemission sampling technique for high-speed integrated-circuit testing
- - H. Beha
  - H.K. Seitz
  - et al.
- 1987
- Microelectronic Engineering
Silicon Micro Mechanics (SIMM): Si-beams with rectangular cross-section for atomic force sensing by means of STM
- - O. Wolter
  - J. Greschner
  - et al.
- 1986
- Microelectronic Engineering
Energy and time-resolved photoemission in a promising new approach for contactless integrated-circuit testing
- - H.K. Seitz
  - A. Blacha
  - et al.
- 1986
- Microelectronic Engineering
Scanning tunneling microscopy
- - H. Salemink
- 1986
- Microelectronic Engineering
Scanning thermal profiler
- - C.C. Williams
  - H.K. Wickramasinghe
- 1986
- Microelectronic Engineering
Electron beam / optical mixed lithography at half-micron ground rules
- - P. Coane
  - P. Rudeck
  - et al.
- 1986
- Microelectronic Engineering
Background and applications of electron beam test techniques
- - Fritz J. Hohn
- 1986
- Microelectronic Engineering
Diazopolysiloxanes: Unique imageable barrier layers
- - E. Babich
  - J.M. Shaw
  - et al.
- 1986
- Microelectronic Engineering
High-temperature-stable Si₃N₄ dummy T-gate and lift-off mask
- - P. Buchmann
  - V. Graf
  - et al.
- 1986
- Microelectronic Engineering