Electrode Flatness Requirements for Cathode Projection Microfabrication SystemsGeorge A. Wardly1975IEEE T-ED
In-Situ Measurement of Dielectric Thickness During Etching or Developing ProcessesKarl L. KonnerthFrederick H. Dill1975IEEE T-ED
V–1 Laser Fabrication of Large-Area Arrays: Thin-Film Silicon Isolated Devices on Fused Silica SubstratesR.A. LaffG.L. Hutchins1974IEEE T-ED
A Two-Dimensional Numerical FET Model for DC, AC, and Large-Signal AnalysisMartin Reiser1973IEEE T-ED