Evaluation of different metal preclean conditions for MOL for 2nm and beyond
- Samuel Swaroop Munnangi
- Andrew Simon
- et al.
- 2024
- ASMC 2024
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5 results at ASMC 2024
DTCO Guided Process Integration: Case Studies From FEOL & BEOL with BSPDN
- Minhaz Abedin
- Shahrukh Khan
- et al.
- 2024
- ASMC 2024
Wet Etch Recipe Optimization for Enabling RMG Multi Vt Scheme
- Alma Vela Ramirez
- Sankar Sankarapandian
- et al.
- 2024
- ASMC 2024
Optimization of Area Selective Barrier on Different Metal Interconnects
- Linda Wangoh
- Andrew Simon
- et al.
- 2024
- ASMC 2024
AI-Powered Process Optimization for EUV MOR: Equipment Trace Data Feature Extraction and Machine Learning is Essential for CD Control
- Mario Faria
- Francis Ortega
- et al.
- 2024
- ASMC 2024