Publications

3 results at ECS Meeting 2015 Phoenix

Critical BEOL aspects of the fabrication of a thermally-assisted MRAM device
- - E.J. O'sullivan
  - Daniel C. Edelstein
  - et al.
- 2015
- ECS Meeting 2015 Phoenix
ALD TaN barrier for enhanced performance with low contact resistance for 14 nm Technology Node Cu Interconnects
- - Joyeeta Nag
  - Brian A. Cohen
  - et al.
- 2015
- ECS Meeting 2015 Phoenix
Material and device integration for hybrid III-V/SiGe CMOS technology
- - Veeresh Deshpande
  - V. Djara
  - et al.
- 2015
- ECS Meeting 2015 Phoenix