Noah Sturcken, Eugene O'Sullivan, et al.
ISSCC 2012
An integrated voltage regulator (IVR) is presented that uses custom fabricated thin-film magnetic power inductors. The inductors are fabricated on a silicon interposer and integrated with a multi-phase buck converter IC by 2.5D chip stacking. Several inductor design variations have been fabricated and tested. The best performance has been achieved with a set of eight coupled inductors that each occupies 0.245 mm2 and provides 12.5 nH with 270 mΩ DC. With early inductor prototypes, the IVR efficiency for a 1.8 V:1.0 V conversion ratio peaks at 71% with FEOL current density of 10.8 A/mm 2 and inductor current density of 1.53 A/mm2. At maximum load current, 69% conversion efficiency and 1.8 V:1.2 V conversion ratio the FEOL current density reaches 22.6 A/mm2 and inductor current density reaches 3.21 A/mm2. © 1966-2012 IEEE.
Noah Sturcken, Eugene O'Sullivan, et al.
ISSCC 2012
Jinwook Oh, Sae Kyu Lee, et al.
VLSI Circuits 2020
Jonathan Z. Sun, R.P. Robertazzi, et al.
DRC 2011
Andrea Fasoli, Chia-Yu Chen, et al.
INTERSPEECH 2021