E. Kay, M. Donath, et al.
Journal of Applied Physics
The etch-rate ratio of oxides to nonoxides in inert gas ion milling systems can be increased by injecting a flux of halocarbon gas molecules onto the surface along with the inert-gas ion beam. In order for the halocarbon to be effective, it must adsorb on the surfaces of interest and the halogon must form a volatile reaction product with the surfaces. The system Ar+/ CCl4/Si and SiO2 is used to illustrate this method.
E. Kay, M. Donath, et al.
Journal of Applied Physics
E. Kay
ISIAT - IPAT 1982
E. Sawatzky, E. Kay
Journal of Applied Physics
E.-A. Knabbe, J.W. Coburn, et al.
Surface Science