Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A prototype reflective spatial light modulator (SLM) system has been developed for writing megabit pages of data into a holographic medium at a rate of 12 pages per minute. The SLM is based upon a crystalline-silicon reflective active-matrix array with integrated data drivers, using liquid crystal (LC) electrooptics and a personal computer system with an interface to provide data. The LC has been optimized for high contrast and efficiency with coherent illumination. The resolution-limited contrast was measured at 4:1, which was high enough to provide bit-error-free charge-coupled-device images using modulation and error-correction codes.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Minkyong Kim, Zhen Liu, et al.
INFOCOM 2008
Robert C. Durbeck
IEEE TACON