Conference paper
Investigations of silicon nano-crystal floating gate memories
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MRS Spring 2000
The authors thank S. Thiruvengadam and A. Bhagat for help with substrate preparation, S. Jay Chey and R. Drake for deposition of ZnO and ITO, R. Ferlita for Ni/Al and MgF2evaporation, S. Mahajan for area measurement, Jemima Gonsalves for TEM sample preparation. This work was conducted as part of a joint development project between Tokyo Ohka Kogyo Co., Ltd., DelSolar Co., Ltd., Solar Frontier K. K. and IBM Corporation. © 2013 WILEY-VCH Verlag GmbH & Co.
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MRS Spring 2000
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