A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
The binary-collision-cascade code, marlowe, was modified to include an accurate electron-density distribution of silicon and an electronic-energy-loss (EEL) model that is suitable for high-energy studies. The EEL model is based on a theory that relates the energy loss and local valence-electron density via a phenomenological band-structure model. The enhanced marlowe is applied to simulate transmission spectra due to the hyperchanneling of high-energy α particles in silicon along the [110] and [111] directions. The transmission spectra due to a ''random'' incident direction was also studied. The channeling peak positions in the energy-transmission spectra agree fairly well with the measurements. The effects of transverse-energy distribution of the incident beam, the effects of electron-multiple scattering and energy-loss straggling, and the effects of nonuniformity of the electron density on the transmission spectra are discussed. The electron-density effects reproduce the stopping-power measurements based on the peak and leading edge of the energy spectrum. The importance of energy-loss straggling, of core-electron contribution to the energy loss at high energies, and of charge-state effects at intermediate energies is also discussed. © 1993 The American Physical Society.
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009