Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
X-ray absorption experiments on 3d transition-metal tracer ions in SrTiO3 are presented. The absorption spectra of the tracer-ion changed upon reduction in the SrTiO3. This change is due to an oxygen vacancy created at the tracer-ion site. This finding is supported by density-functional theory calculations, which prove that the oxygen vacancies preferentially are created at the tracer-ion sites. Using the chemical sensitivity of x-ray absorption spectroscopy, tracer ions can be used to detect oxygen vacancies in SrTiO3 and possibly in other oxide systems. © 2009 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T. Schneider, E. Stoll
Physical Review B
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983