Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A moment method for handling arbitrarily shaped 2-D and 3-D waveguides that involve either conductors, finite-size dielectric regions, or both is presented. A procedure for modeling the dielectric allows 2-D rooftop functions to represent both the 3-D polarization current in the dielectric and the surface current on the conductors, and precludes the presence of fictitious charge within the dielectric. Examples include coaxial, microstrip, and dielectric waveguides. Numerical convergence, consistency with physical principles, and agreement with the literature are demonstrated.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.N. Tu
Materials Science and Engineering: A
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.K. Gimzewski, T.A. Jung, et al.
Surface Science