EXPERIMENTAL TECHNOLOGY AND CHARACTERIZATION OF SELF-ALIGNED 0. 1 mu M-GATE-LENGTH LOW-TEMPERATURE OPERATION NMOS DEVICES.
- G.A. Sai-Halasz
- M.R. Wordeman
- et al.
- 1986
- IEDM 1986
Publications
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19 results for T.H.P. Chang
New evidence for localized electronic states on atomically sharp field emitters
- Ming L. Yu
- Norton D. Lang
- et al.
- 1996
- Physical Review Letters
Inverter Performance Of Deep-Submicrometer Mosfet'S
- George A. Sai-Halasz
- Matthew R. Wordeman
- et al.
- 1988
- IEEE Electron Device Letters
Electron beam microcolumn for multi-beam applications
- E. Kratschmer
- H.S. Kim
- et al.
- 1995
- IVMC 1995
Electron-beam microcolumn technology and applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1995
- SPIE Optical Science, Engineering, and Instrumentation 1995
Performance of Zr/O/W Schottky emitters at reduced temperatures
- H.S. Kim
- M.L. Yu
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Minimum emission current of liquid metal ion sources
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Energy distributions of Zr/O/W Schottky electron emission
- H.S. Kim
- M.L. Yu
- et al.
- 1997
- Journal of Applied Physics
Energy distributions of field emitted electrons from carbide tips and-tuncisten tips with dismondlike carbon coatinas
- Ming L. Yu
- Ho-Seob Kim
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering