Skip to main content
Research
Focus areas
Blog
Publications
Careers
About
Back
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Back
About
Overview
Labs
People
Back
Semiconductors
Back
Artificial Intelligence
Back
Quantum Computing
Back
Hybrid Cloud
Back
Overview
Back
Labs
Back
People
Research
Focus areas
Semiconductors
Artificial Intelligence
Quantum Computing
Hybrid Cloud
Blog
Publications
Careers
About
Overview
Labs
People
Open IBM search field
Close
IWJT 2009
Conference paper
01 Dec 2009
Electron holography for 2-D dopant profiling
View publication
Abstract
No abstract available.
Related
Conference paper
Energy density and temperature calibration for feol nanosecond laser annealing
Conference paper
External Resistance Reduction by Nanosecond Laser Anneal in Si/SiGe CMOS Technology
Conference paper
Parasitic Resistance Reduction Strategies for Advanced CMOS FinFETs beyond 7nm
Conference paper
Impact of Nanosecond Laser Anneal on PVD Ru Films
View all publications