Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
After quenching of Au‐doped FZ silicon an anisotropic axially symmetric EPR spectrum is observed. The spectrum exhibits a hyperfine interaction with 197Au nuclei (I = ½). In samples which were intentionally doped with isotopically enriched 57Fe (I = ½) an additional hyperfine interaction with this nucleus is observed. Due to the large nuclear electric quadrupole moment of 107Au the nuclear quadrupole interaction strongly influences the EPR spectrum. From this effect a lower limit for the quadrupole interaction can be derived by a computer diagonalization of the spin Hamiltonian. From the observed hyperfine interactions and the known properties of Fe and Au in silicon it is concluded that this spectrum originates from a [AusFei] complex. Copyright © 1981 WILEY‐VCH Verlag GmbH & Co. KGaA
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Robert W. Keyes
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.C. Marinace
JES