P. Häussler, D. Moorhead, et al.
Journal of Non-Crystalline Solids
A method is described to incorporate metals into fluorocarbon polymer films produced in a plasma environment by a simultaneous etching and polymerization process. The emphasis of this work is on a molybdenum-perfluoropropane system, and films produced in this manner were found to contain as much as 20% molybdenum by weight. Some aspects of their structure are discussed. © 1978, Taylor & Francis Group, LLC. All rights reserved.
P. Häussler, D. Moorhead, et al.
Journal of Non-Crystalline Solids
E. Kay, P. Ziemann
Journal of Applied Physics
J. Perrin, B. Despax, et al.
JVSTA
U. Gerlach-Meyer, J.W. Coburn, et al.
Journal of Applied Physics