E. Kay, F. Parmigiani, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Incorporation of Metals into Fluoropolymer Films Synthesized by Plasma Techniques
Abstract
A method is described to incorporate metals into fluorocarbon polymer films produced in a plasma environment by a simultaneous etching and polymerization process. The emphasis of this work is on a molybdenum-perfluoropropane system, and films produced in this manner were found to contain as much as 20% molybdenum by weight. Some aspects of their structure are discussed. © 1978, Taylor & Francis Group, LLC. All rights reserved.
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