E. Kay, M. Donath, et al.
Journal of Applied Physics
A method is described to incorporate metals into fluorocarbon polymer films produced in a plasma environment by a simultaneous etching and polymerization process. The emphasis of this work is on a molybdenum-perfluoropropane system, and films produced in this manner were found to contain as much as 20% molybdenum by weight. Some aspects of their structure are discussed. © 1978, Taylor & Francis Group, LLC. All rights reserved.
E. Kay, M. Donath, et al.
Journal of Applied Physics
E.-A. Knabbe, J.W. Coburn, et al.
Surface Science
M.M. Millard, E. Kay
JES
A. Dilks, E. Kay
Macromolecules