J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
The effects of creating porosity by using templating particles on the delamination and fracture properties of organosilicate films was investigated. Poly(ethylene glycol) surface-decorated polystyrene particles were dissolved in a propylene glycol methyl ether acetate (PGMEA) and xylene mixture at a concentration of 20.3 wt%. The porogen solution was then mixed with the organosilicate solution in the propylene glycol monoethyl ether at an equivalent concentration in the desired ratios on a weight basis. All formulations were filtered through a 0.2 μm Teflon membrane syringe filter directly onto 100 mm Si substrates, and spin-coated at 3000 rpm for 30 seconds. It was observed that the nature of the porogen selected to generate porosity in organosilicate thin films has a tremendous impact on the fracture energy.
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
T.N. Morgan
Semiconductor Science and Technology
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Ming L. Yu
Physical Review B