CMOS-embedded lasers for advanced silicon photonic devices
Marc Seifried, Herwig Hahn, et al.
ICTON 2017
CMOS-compatible III-V lasers integrated on silicon are a crucial step to reduce power consumption and cost for next-generation optical transceivers. Here, we demonstrate a concept to co-integrate III-V lasers into a CMOS Silicon Photonics platform, in which lasers, photonics, and electronic circuitry share the same back end of line. Based on a bonded III-V epitaxial layer stack, ultra-thin laser devices, optically pumped lasing and coupling to silicon are demonstrated. Furthermore, we present all building blocks for electrically pumped laser devices.
Marc Seifried, Herwig Hahn, et al.
ICTON 2017
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Svenja Mauthe, Noelia Vico Triviño, et al.
IEEE JSTQE
Svenja Mauthe, Yannick Baumgartner, et al.
OFC 2020