J.N. Burghartz, A.O. Cifuentes, et al.
VLSI Technology 1993
Paper
Multilevel monolithic inductors in silicon technology
Abstract
Multilevel monolithic inductors implemented in a standard BiCMOS technology are presented. Use of top metal layers shunted with vias provides Q values approaching 10 at 2.4GHz and above 6 at 900MHz for a 2nH inductor. There is no modification to the conventional wiring metallurgy and no need for extra processing steps. © 1995, IEE. All rights reserved.