M. Soyuer, J.N. Burghartz, et al.
BCTM 1996
A novel bipolar isolation structure with capability of significantly reducing collector-base capacitance and base resistance is presented. A silicon-on-insulator (SOI) region surrounding the collector opening is used to minimize the collector window width, and to increase the thickness of the extrinsic base contact layer for a given device topography. This partial-SOI isolation structure can be combined with any type of emitter-base self-alined bipolar transistor structure.
M. Soyuer, J.N. Burghartz, et al.
BCTM 1996
J.N. Burghartz, T.O. Sedgwick, et al.
BCTM 1993
J.D. Cressler, D.D. Tang, et al.
Workshop on Low Temperature Semiconductor Electronics 1989
J.H. Comfort, G.L. Patton, et al.
IEDM 1990