Mark W. Dowley
Solid State Communications
We have replaced the electron gun and beam blanking system of a conventional voltage contrast scanning electron microscope by a pulsed laser/photocathode combination, resulting in a source pro-ducing electron pulses of order 1 ps in duration at a 100 MHz repetition rate and with a peak brightness of 3 108 A/cm2 sr at 1.8 keV. This novel instrument has demonstrated stroboscopic noncontact waveform measurements on metal interconnect lines in different environments with a temporal resolution better than 5 ps, a voltage resolution of 3 mV/(Hz)1/2, and a spatial resolution of 0.1 μ m. These measurements are achieved with extraction fields above the sample of about 1 kV/mm. © 1988 IEEE
Mark W. Dowley
Solid State Communications
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989