Two-dimensional profiling of shallow junctions in Si metal-oxide-semiconductor structures using scanning tunneling spectroscopy and transmission electron microscopy
- E.T. Yu
- K. Barmak
- et al.
- 1996
- Journal of Applied Physics
Publications
Date
Featured collections
Popular topics
50 results for J.-M. Halbout
Cross-sectional scanning tunneling microscopy of MBE-grown Si p-n junctions and Si/SiGe superlattices
- E.T. Yu
- M. Johnson
- et al.
- 1993
- Journal of Crystal Growth
Electroluminescence and Photoluminescence from Microporous Silicon p-n Junctions
- V.P. Kesan
- E. Bassous
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effect of substrate thickness on radiation properties of coplanar strip antennas
- M. Heimlich
- W. Robertson
- et al.
- 1992
- Electronics Letters
Scanning tunneling microscopy and spectroscopy of Si/SiGe(001) superlattices
- E.T. Yu
- J.-M. Halbout
- et al.
- 1992
- Applied Physics Letters
Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CFx at the Al/Si interface
- G. Tas
- R.J. Stoner
- et al.
- 1992
- Applied Physics Letters
Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics
- H.-N. Lin
- R.J. Stoner
- et al.
- 1992
- Applied Physics Letters
Electrical profiling of Si(001) p-n junctions by scanning tunneling microscopy
- E.T. Yu
- M. Johnson
- et al.
- 1992
- Applied Physics Letters
A high-speed silicon metal-semiconductor-metal photodetector fully integrable with (Bi)CMOS circuits
- E. Bassous
- M. Scheuermann
- et al.
- 1991
- IEDM 1991
Silicon Mach-Zehnder waveguide interferometers based on the plasma dispersion effect
- G.V. Treyz
- P.G. May
- et al.
- 1991
- Applied Physics Letters