F.A. Houle, C.R. Jones, et al.
Applied Physics Letters
Paper
Photochemical generation and deposition of copper from a gas phase precursor
Abstract
The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.
Related
G.M. Wallraff, D. Medeiros, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
F.A. Houle
The Journal of Chemical Physics
Conference paper
Laser - assisted chemical etching
F.A. Houle
Proceedings of SPIE 1989