G.M. Wallraff, D. Medeiros, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.
G.M. Wallraff, D. Medeiros, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
N. Zhou, K. Racette, et al.
SPIE Photomask Technology + EUV Lithography 2008
F.A. Houle, W.D. Hinsberg, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
E.E. Marinero, C.R. Jones
The Journal of Chemical Physics