M. Gribelyuk, A.C. Callegari, et al.
Journal of Applied Physics
Quantum-mechanical modeling of electron tunneling current from the quantized inversion layer of ultra-thin-oxide (<40 Å) nMOSFET's is presented, together with experimental verification. An accurate determination of the physical oxide thickness is achieved by fitting experimentally measured capacitance-versus-voltage curves to quantum-mechanically simulated capacitance-versus-voltage results. The lifetimes of quasibound states and the direct tunneling current are calculated using a transverse-resonant method. These results are used to project an oxide scaling limit of 20 Å before the chip standby power becomes excessive due to tunneling currents.
M. Gribelyuk, A.C. Callegari, et al.
Journal of Applied Physics
Y. Taur, Y. Mii, et al.
IBM J. Res. Dev
Y. Taur, S. Cohen, et al.
IEDM 1992
L.K. Han, S.W. Crowder, et al.
IEDM 1997