Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have developed a Data-Driven Self-Timed (DDST) Rapid-Single-Flux-Quantum (RSFQ) demultiplexer (demux) for the interface between on-chip high-speed RSFQ circuits and off-chip low-speed circuits. In order to eliminate the timing issue in a synchronous clocking system we employed the DDST architecture, where a clock signal is localized within a 2bit basic demux module and dual rail lines are used to transfer the timing information between the modules. A larger demux can be produced simply by connecting the 2-bit modules in a tree structure. The DDST demux was designed for 10 Gb/s operation with sufficient dc bias margin using HYPRES 1 kA/cm2 Nb process. We have successfully tested operation of the 2-bit demux up to 18 GHz using the DDST on-chip high-speed test system which was developed in our group. © 1999 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michiel Sprik
Journal of Physics Condensed Matter
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films