Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Poly(9,9-dialkylfluorene-2,7-diyl)s were synthesized by nickel (0) mediated polymerization. This polymerization yielded high molecular weight and thermally stable polymers. To study the structure-property relationship of excimer formation in the polymer films, absorption and fluorescence spectra were measured before and after annealing at elevated temperature. The annealed films showed a longer wavelength emission band corresponding to excimer formation in the homopolymers.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology
A. Krol, C.J. Sher, et al.
Surface Science
T. Schneider, E. Stoll
Physical Review B