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PaperHigh-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffractionDavid Cooper, N. Bernier, et al.Applied Physics Letters
PaperDual-lens electron holography for junction profiling and strain mapping on semiconductor devicesYun-Yu Wang, Anthony Domenicucci, et al.Electronic Device Failure Analysis
Conference paperWafer scale fabrication of carbon nanotube FETs with embedded poly-gatesShu-Jen Han, Josephine Chang, et al.IEDM 2010