Summary Abstract: Chemical processes in fluorine-based etching reactions

J. Tersoff

Applied Surface Science

Biancun Xie, Madhavan Swaminathan, et al.

EMC 2011

I.K. Pour, D.J. Krajnovich, et al.

SPIE Optical Materials for High Average Power Lasers 1992

B.A. Hutchins, T.N. Rhodin, et al.

Surface Science