Summary Abstract: Diagnostics in plasma processing

L.K. Wang, A. Acovic, et al.

MRS Spring Meeting 1993

B.A. Hutchins, T.N. Rhodin, et al.

Surface Science

Arvind Kumar, Jeffrey J. Welser, et al.

MRS Spring 2000

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008