Martin Glodde, Dario L. Goldfarb, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Martin Glodde, Dario L. Goldfarb, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Dario L. Goldfarb, Libor Vyklicky, et al.
J. Photopolym. Sci. Tech.
Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008
David R. Medeiros, Karen Petrillo, et al.
Microlithography 2002