L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
We introduce a novel method for ultra-fast (< 100ns) measurement of the inversion charge in MOSFETs thereby minimizing the impact of charge trapping. This technique in conjunction with pulsed I-V measurements shows only a modest enhancement in peak mobility (∼ 15%) in high-K gate dielectric devices, indicating that charge trapping does not fully account for observed mobility degradation. © 2004 IEEE.
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Paul M. Solomon, Min Yang
IEDM 2004
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Yu-Ming Lin, Joerg Appenzeller, et al.
IEDM 2004