E. Gusev, C. Cabral Jr., et al.
IEDM 2004
The Fermi level at the Ga oxide/GaAs interface has been unpinned by rf plasma cleaning the GaAs surface in H2 and N2. Following plasma cleaning, a Ga oxide film is reactively electron beam deposited onto the substrate. Metal-oxide-semiconductor (MOS) capacitors fabricated on these structures show good high-frequency capacitance-voltage characteristics. This indicates that the density of interface states has been reduced to ∼10 11 eV-1 cm-2. The MOS capacitors are found to be stable in air after several months.
E. Gusev, C. Cabral Jr., et al.
IEDM 2004
A.C. Callegari, E.T-S. Pan, et al.
Applied Physics Letters
S. Zafar, M. Yang, et al.
VLSI Technology 2005
S.J. Wind, Y. Taur, et al.
MRS Spring Meeting 1995