Conference paper
Polysilanes: photochemistry and deep UV lithography
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
No abstract available.
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
R.D. Miller, D. Thompson, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Qinghuang Lin, Alshakim Nelson, et al.
SPIE Advanced Lithography 2011
R.D. Miller, R. Sooriyakumaran
Journal of Polymer Science Part A: Polymer Chemistry