XY table and tilting stage for scanning electron microscope (SEM)

Oliver C. Wells

doi:10.1063/1.1134018

Review of Scientific Instruments

Paper

02 Sep 2008

XY table and tilting stage for scanning electron microscope (SEM)

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Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

Paper

Magnetic Domains in Thin-Film Recording Heads as Observed in the SEM by a Lock-In Technique

Oliver C. Wells, Richard J. Savoy

IEEE Transactions on Magnetics

Conference paper

The fiftieth anniversary of the first applications of the scanning electron microscope in materials research

Kenneth C.A. Smith, Oliver C. Wells, et al.

IC-CPO 2006

Paper

Magnetically filtered low-loss scanning electron microscopy

Oliver C. Wells, Eric Munro

Ultramicroscopy

Paper

Examining deep holes by rocking the beam in the scanning electron microscope

Oliver C. Wells

Review of Scientific Instruments

View all publications

Abstract

Related

Magnetic Domains in Thin-Film Recording Heads as Observed in the SEM by a Lock-In Technique

The fiftieth anniversary of the first applications of the scanning electron microscope in materials research

Magnetically filtered low-loss scanning electron microscopy

Examining deep holes by rocking the beam in the scanning electron microscope