Ultrafast deep UV lithography using excimer lasers
- K. Jain
- S. Rice
- et al.
- 2004
- Polymer Engineering & Science
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23 results for K. Jain
EXCIMER LASER PROJECTION LITHOGRAPHY ON A FULL-FIELD SCANNING PROJECTION SYSTEM.
- R.T. Kerth
- K. Jain
- et al.
- 1986
- IEEE Electron Device Letters
Beam intensity uniformization by mirror folding
- M.R. Latta
- K. Jain
- 1984
- Optics Communications
Excimer laser projection lithography
- K. Jain
- R.T. Kerth
- 1984
- Applied Optics
Direct high-resolution excimer laser photoetching
- S. Rice
- K. Jain
- 1984
- Applied Physics A Solids and Surfaces
Reciprocity Behavior of Photoresists in Excimer Laser Lithography
- Sondra Rice
- Kanti Jain
- 1984
- IEEE T-ED
Excimer laser projection photoetching
- M.R. Latta
- R. Moore
- et al.
- 1984
- Journal of Applied Physics
Frequency doubling in a LiNbO3 thin film deposited on sapphire
- G.H. Hewig
- K. Jain
- 1983
- Journal of Applied Physics
ORGANIC MATERIALS FOR OPTICAL SECOND HARMONIC GENERATION.
- R.J. Twieg
- K. Jain
- 1982
- ACS National Meeting 1982
Frequency doubling in an organic waveguide
- G.H. Hewig
- K. Jain
- 1983
- Optics Communications