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- J.F. Smyth
- S. Schultz
- et al.
- 1991
- Journal of Applied Physics
- C. Jacobsen
- S. Williams
- et al.
- 1991
- Optics Communications
- Kam-Leung Lee
- C.H. Schaefer
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- T.H.P. Chang
- D. Kern
- et al.
- 1991
- IEEE T-ED
- 1991
- Microelectronic Engineering
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
- Michael G. Rosenfield
- S. Rishton
- et al.
- 1991
- Microelectronic Engineering
- Harald Ade
- Janos Kirz
- et al.
- 1990
- Applied Physics Letters
- Harald Ade
- Janos Kirz
- et al.
- 1990
- Nuclear Inst. and Methods in Physics Research, A
- Harvey Rarback
- Chris Buckley
- et al.
- 1990
- Nuclear Inst. and Methods in Physics Research, A